A Design Study for Thermal Control of a CVD Reactor for YBCO

نویسندگان

  • Martha A. Gallivan
  • David G. Goodwin
  • Richard M. Murray
چکیده

Active thermal control of a reactor for YBa2Cu3O7-x chemical vapor deposition is studied using a nonlinear heat transfer model validated by preliminary component testing. LQR and LQE methods are applied to the linearized model for observer-based control. Convergence rates of the controller and observer are indicated by closed-loop eigenvalues and disturbance rejection is assessed with H2 and H∞ norms. Design tradeoffs are quantified with these measures by varying model parameters. Maximum errors in control and estimation for a nominal design case are both 21 K, and longest timescales are 45 seconds and 10 seconds for the controller and observer, respectively.

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تاریخ انتشار 1997